規格詳情

• E-GUN TYPE : Cold-cathode Field Emissions Electron source Accelerating Voltage 0.5 to 30 kV (variable in 0.1kV steps)  Sample change: air lock
• VACUUM TYPE : Oil pump*1,  TMP*1
• STAGE TYPE : 3 axes motorized stage
• PS/OS : Windows XP
• DERECTOR : Upper secondary electron detector,  Lower secondary electron detector

*The system is operating in Taiwan Service Lab supporting routine SEM jobs.